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The purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC
such as a heavily doped substrate or an internally gettered wafer with oxide precipitates
Such EES items may include small geometry device structures on wafers
It is not intended to specify a complete set of equipment types
The present Document defines a noncontact
F03000 - SEMI F30 - 据付現場における微量ガス不純物およびパーティクルに関する精製器性能テストの始動および検証 Revision:SEMI F30-0710 - Superseded The purpose of this Testglobal Gases Interfaces & Carriers Committee2010430global Audits and Reviews Subcommittee20106www. semi. org1998 1001ppm101ppb50LPM Referenced SEMI Standards SEMI F58 Test Method for Determination of Moisture Dry Down Characteristics of Surface Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectroscopy (APIMS) SEMI F68 Test Method for Determining Purifier Efficiency